3/28/2010	1:55:45 PM	Program exited cleanly
3/28/2010	2:16:33 PM	Program started normally
3/28/2010	2:16:33 PM	Helium valve closed
3/28/2010	2:16:33 PM	H2 valve closed
3/28/2010	2:16:33 PM	BCl3 valve closed
3/28/2010	2:16:33 PM	PH3 valve closed
3/28/2010	2:16:33 PM	SiCl4 pre valve closed
3/28/2010	2:16:33 PM	SiCl4 post valve closed
3/28/2010	2:16:33 PM	Main Vac valve closed
3/28/2010	2:16:33 PM	Bypass valve closed
3/28/2010	2:16:33 PM	Bubbler valve closed
3/28/2010	2:16:33 PM	Helium MFC set to  0.000000
3/28/2010	2:16:33 PM	H2 MFC set to  0.000000
3/28/2010	2:16:33 PM	BCl3 MFC set to  0.000000
3/28/2010	2:16:33 PM	SiCl4 MFC set to  0.000000
3/28/2010	2:16:33 PM	Bypass solenoid MFC set to  760.000000
3/28/2010	2:16:34 PM	Tube furnace set to 0
3/28/2010	2:16:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2010	2:16:38 PM	Recipe started at 2:16 PM
3/28/2010	2:16:38 PM	H2 valve closed
3/28/2010	2:16:38 PM	BCl3 valve closed
3/28/2010	2:16:38 PM	PH3 valve closed
3/28/2010	2:16:38 PM	SiCl4 pre valve closed
3/28/2010	2:16:38 PM	SiCl4 post valve closed
3/28/2010	2:16:38 PM	Main Vac valve closed
3/28/2010	2:16:38 PM	Bypass valve closed
3/28/2010	2:16:38 PM	Bubbler valve closed
3/28/2010	2:16:38 PM	Helium valve opened
3/28/2010	2:16:38 PM	Helium MFC set to  500.000000
3/28/2010	2:16:38 PM	H2 MFC set to  0.000000
3/28/2010	2:16:38 PM	BCl3 MFC set to  0.000000
3/28/2010	2:16:38 PM	SiCl4 MFC set to  0.000000
3/28/2010	2:16:38 PM	Bypass solenoid MFC set to  0.000000
3/28/2010	2:16:38 PM	Tube furnace set to 0
3/28/2010	2:17:56 PM	Helium valve closed
3/28/2010	2:17:56 PM	H2 valve closed
3/28/2010	2:17:56 PM	BCl3 valve closed
3/28/2010	2:17:56 PM	PH3 valve closed
3/28/2010	2:17:56 PM	SiCl4 pre valve closed
3/28/2010	2:17:56 PM	SiCl4 post valve closed
3/28/2010	2:17:56 PM	Main Vac valve closed
3/28/2010	2:17:56 PM	Bypass valve closed
3/28/2010	2:17:56 PM	Bubbler valve closed
3/28/2010	2:17:56 PM	Helium MFC set to  0.000000
3/28/2010	2:17:56 PM	H2 MFC set to  0.000000
3/28/2010	2:17:56 PM	BCl3 MFC set to  0.000000
3/28/2010	2:17:56 PM	SiCl4 MFC set to  0.000000
3/28/2010	2:17:56 PM	Bypass solenoid MFC set to  0.000000
3/28/2010	2:17:57 PM	Tube furnace set to 0
3/28/2010	2:17:57 PM	Run finished at 2:17 PM
3/28/2010	2:17:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/28/2010	2:31:34 PM	Bypass valve opened
3/28/2010	2:31:52 PM	Main Vac valve opened
3/28/2010	2:36:39 PM	Bypass valve closed
3/28/2010	2:36:40 PM	Main Vac valve closed
3/28/2010	2:36:40 PM	Main Vac valve opened
3/28/2010	2:36:41 PM	Main Vac valve closed
3/28/2010	2:36:48 PM	Main Vac valve opened
3/28/2010	2:36:49 PM	Bypass valve opened
3/28/2010	3:08:41 PM	Program started after a nonstandard shutdown
3/28/2010	3:08:41 PM	Helium valve closed
3/28/2010	3:08:41 PM	H2 valve closed
3/28/2010	3:08:41 PM	BCl3 valve closed
3/28/2010	3:08:41 PM	PH3 valve closed
3/28/2010	3:08:41 PM	SiCl4 pre valve closed
3/28/2010	3:08:41 PM	SiCl4 post valve closed
3/28/2010	3:08:41 PM	Main Vac valve closed
3/28/2010	3:08:41 PM	Bypass valve closed
3/28/2010	3:08:41 PM	Bubbler valve closed
3/28/2010	3:08:41 PM	Helium MFC set to  0.000000
3/28/2010	3:08:41 PM	H2 MFC set to  0.000000
3/28/2010	3:08:41 PM	BCl3 MFC set to  0.000000
3/28/2010	3:08:41 PM	SiCl4 MFC set to  0.000000
3/28/2010	3:08:41 PM	Bypass solenoid MFC set to  760.000000
3/28/2010	3:08:41 PM	Tube furnace set to 0
3/28/2010	3:08:43 PM	Bypass valve opened
3/28/2010	3:08:44 PM	Main Vac valve opened
3/28/2010	3:08:57 PM	SiCl4 MFC set to  100.000000
3/28/2010	3:09:09 PM	SiCl4 MFC set to  0.000000
3/28/2010	3:19:16 PM	Bypass valve closed
3/28/2010	3:19:17 PM	Main Vac valve closed
3/28/2010	3:19:29 PM	Main Vac valve opened
3/28/2010	3:19:30 PM	Bypass valve opened
3/28/2010	9:46:48 PM	Bypass valve closed
3/28/2010	9:46:48 PM	Main Vac valve closed
3/28/2010	9:47:05 PM	Bypass valve opened
3/28/2010	9:47:05 PM	Main Vac valve opened
3/28/2010	10:35:07 PM	Bypass valve closed
3/28/2010	10:35:07 PM	Main Vac valve closed
3/28/2010	10:35:22 PM	Main Vac valve opened
3/28/2010	10:35:23 PM	Bypass valve opened
3/28/2010	10:35:33 PM	Bypass valve closed
3/28/2010	10:35:33 PM	Main Vac valve closed
3/28/2010	10:35:53 PM	Bypass valve opened
3/28/2010	10:35:54 PM	Main Vac valve opened
3/28/2010	10:43:54 PM	Bypass valve closed
3/28/2010	10:43:55 PM	Main Vac valve closed
3/28/2010	10:43:59 PM	H2 MFC set to  500.000000
3/28/2010	10:44:01 PM	H2 valve opened
3/28/2010	10:44:18 PM	H2 valve closed
3/28/2010	10:44:20 PM	H2 MFC set to  0.000000
3/28/2010	10:45:04 PM	H2 valve opened
3/28/2010	10:45:08 PM	H2 MFC set to  500.000000
3/28/2010	10:46:17 PM	H2 valve closed
3/28/2010	10:46:20 PM	H2 MFC set to  0.000000
3/28/2010	10:52:03 PM	Bypass valve opened
3/28/2010	10:52:16 PM	Main Vac valve opened
